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ADXL323 데이터시트(PDF) 11 Page - Analog Devices

부품명 ADXL323
상세설명  Small, Low Power, 2-Axis 3 g iMEMS Accelerometer
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ADXL323 데이터시트(HTML) 11 Page - Analog Devices

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ADXL323
Rev. 0 | Page 11 of 16
THEORY OF OPERATION
The ADXL323 is a complete 2-axis acceleration measurement
system on a single, monolithic IC. The ADXL323 has a measure-
ment range of ±3 g minimum. It contains a polysilicon surface
micromachined sensor and signal conditioning circuitry to
implement an open-loop acceleration measurement architecture.
The output signals are analog voltages that are proportional to
acceleration. The accelerometer can measure the static accelera-
tion of gravity in tilt sensing applications, as well as dynamic
acceleration resulting from motion, shock, or vibration.
The sensor is a polysilicon surface micromachined structure
built on top of a silicon wafer. Polysilicon springs suspend the
structure over the surface of the wafer and provide a resistance
against acceleration forces. Deflection of the structure is meas-
ured using a differential capacitor that consists of independent
fixed plates and plates attached to the moving mass. The fixed
plates are driven by 180° out-of-phase square waves. Acceleration
deflects the moving mass and unbalances the differential
capacitor resulting in a sensor output whose amplitude is
proportional to acceleration. Phase-sensitive demodulation
techniques are then used to determine the magnitude and
direction of the acceleration.
The demodulator output is amplified and brought off-chip
through a 32 kΩ resistor. The user then sets the signal band-
width of the device by adding a capacitor. This filtering improves
measurement resolution and helps prevent aliasing.
MECHANICAL SENSOR
The ADXL323 uses a single structure for sensing the X-axis and
Y-axis. As a result, the sense directions of the two axes are
highly orthogonal with little cross axis sensitivity. Mechanical
misalignment of the sensor die to the package is the chief
source of cross axis sensitivity. Mechanical misalignment can, of
course, be calibrated out at the system level.
PERFORMANCE
Rather than using additional temperature compensation
circuitry, innovative design techniques ensure that high
performance is built in to the ADXL323. As a result, there is
neither quantization error nor nonmonotonic behavior, and
temperature hysteresis is very low (typically less than 3 mg over
the −25°C to +70°C temperature range).
Figure 13 and Figure 16 show the zero g output performance of
eight parts (X-axis and Y-axis) soldered to a PCB over a −25°C
to +70°C temperature range.
Figure 25 and Figure 28 demonstrate the typical sensitivity shift
over temperature for supply voltages of 3 V. This is typically
better than ±1% over the −25°C to +70°C temperature range.


유사한 부품 번호 - ADXL323_15

제조업체부품명데이터시트상세설명
logo
Analog Devices
ADXL323KCPZ AD-ADXL323KCPZ Datasheet
293Kb / 16P
   Small, Low Power, 2-Axis 짹3 g i MEMS Accelerometer
REV. 0
ADXL323KCPZ-RL AD-ADXL323KCPZ-RL Datasheet
293Kb / 16P
   Small, Low Power, 2-Axis 짹3 g i MEMS Accelerometer
REV. 0
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유사한 설명 - ADXL323_15

제조업체부품명데이터시트상세설명
logo
Analog Devices
ADXL330 AD-ADXL330_15 Datasheet
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   Small, Low Power, 3-Axis 3 g iMEMS Accelerometer
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ADXL335 AD-ADXL335_10 Datasheet
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ADXL335 AD-ADXL335 Datasheet
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ADXL327 AD-ADXL327 Datasheet
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ADXL377BCPZ-RL7 AD-ADXL377BCPZ-RL7 Datasheet
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ADXL316 AD-ADXL316 Datasheet
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   Small, Low Power, 3-Axis plus minus16 g Accelerometer
logo
NXP Semiconductors
FXLS8967AF NXP-FXLS8967AF Datasheet
1Mb / 98P
   3-Axis Low-g Accelerometer
Rev. 1-27 April 2021
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