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ADXL78 데이터시트(PDF) 7 Page - Analog Devices |
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ADXL78 데이터시트(HTML) 7 Page - Analog Devices |
7 / 12 page ADXL78 Rev. A | Page 7 of 12 THEORY OF OPERATION The ADXL78 provides a fully differential sensor structure and circuit path, resulting in the industry’s highest resistance to EMI/RFI effects. This latest generation uses electrical feedback with zero-force feedback for improved accuracy and stability. The sensor resonant frequency is significantly higher than the signal bandwidth set by the on-chip filter, avoiding the signal analysis problems caused by resonant peaks near the signal bandwidth. Figure 5 is a simplified view of one of the differential sensor elements. Each sensor includes several differential capacitor unit cells. Each cell is composed of fixed plates attached to the substrate and movable plates attached to the frame. Displacement of the frame changes the differential capacitance, which is measured by the on-chip circuitry. Complementary 400 kHz square waves drive the fixed plates. Electrical feedback adjusts the amplitudes of the square waves such that the ac signal on the moving plates is 0. The feedback signal is linearly proportional to the applied acceleration. This unique feedback technique ensures that there is no net electrostatic force applied to the sensor. The differential feedback control signal is also applied to the input of the filter, where it is filtered and converted to a single-ended signal. UNIT SENSING CELL MOVABLE FRAME FIXED PLATES UNIT FORCING CELL ANCHOR MOVING PLATE PLATE CAPACITORS ANCHOR Figure 5. Simplified View of Sensor Under Acceleration |
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