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E / 11724 / A
www.sensortechnics.com
FMA Series
Mass flow sensors for gases
FLOW SPECIFICATIONS
(V
S = 10 ±0.01 V, TA = 25°C)
OUTPUT VS. FLOW CURVES
FMAL001DU
FMAL006DU
U
D
1
0
0
L
A
M
FU
D
6
0
0
L
A
M
F
.
s
s
e
r
P
)
r
a
b
m
(
w
o
l
F
)
m
c
c
s
(
7
.
m
o
N
V
(
C
D )
.
l
o
T
V
±
(
C
D )
.
s
s
e
r
P
)
r
a
b
m
(
w
o
l
F
)
m
p
l
s
(
7
.
m
o
N
V
(
C
D )
.
l
o
T
V
±
(
C
D )
3
2
.
2
0
0
0
1
0
0
.
55
1
.
00
.
0
2
6
0
0
.
55
1
.
0
7
8
.
1
0
0
9
7
9
.
46
1
.
07
.
4
1
5
9
8
.
40
2
.
0
2
5
.
1
0
0
8
9
8
.
47
1
.
07
0
.
9
4
0
7
.
45
2
.
0
6
1
.
1
0
0
7
8
7
.
48
1
.
00
4
.
6
3
0
4
.
45
3
.
0
4
9
.
0
0
0
6
3
6
.
49
1
.
05
3
.
3
2
0
8
.
30
3
.
0
1
7
.
0
0
0
5
3
4
.
40
2
.
07
1
.
1
1
0
1
.
30
3
.
0
0
5
.
0
0
0
4
5
1
.
41
2
.
00
0
.
0
0
0
0
.
15
0
.
0
3
3
.
0
0
0
3
6
7
.
39
1
.
0
9
1
.
0
0
0
2
3
2
.
37
1
.
0
8
0
.
0
0
0
1
9
4
.
24
1
.
0
0
0
.
0
0
0
0
.
15
0
.
0
Note:
7 Devices are calibrated in mass flow. Tolerance values apply to calibration type only.